@Article{AmirovZiGoNaAbRa:2012:InInCo,
               author = "Amirov, I. I. and Zimin, S. P. and Gorlachev, E. S. and Naumov, V. 
                         V. and Abramof, E. and Rappl, Paulo Henrique de Oliveira",
          affiliation = "Yaroslavl Branch of the Institute of Physics and Technology, 
                         Russian Academy of Sciences, ul. Universitetskaya 21, Yaroslavl, 
                         150007 Russia and Microelectronics Department, Yaroslavl State 
                         University, ul. Sovetskaya 14, Yaroslavl, 150000 Russia and 
                         Yaroslavl Branch of the Institute of Physics and Technology, 
                         Russian Academy of Sciences, ul. Universitetskaya 21, Yaroslavl, 
                         150007 Russia and Yaroslavl Branch of the Institute of Physics and 
                         Technology, Russian Academy of Sciences, ul. Universitetskaya 21, 
                         Yaroslavl, 150007 Russia and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)}",
                title = "Investigations of the inductively coupled argon plasma sputtering 
                         of Pb1 \− x Sn x Te ternary solid solution",
              journal = "Journal of Surface Investigation: X-ray, Synchroton and Neutron 
                         Techniques",
                 year = "2012",
               volume = "6",
               number = "4",
                pages = "643--646",
                 note = "{Setores de Atividade: Pesquisa e desenvolvimento 
                         cient{\'{\i}}fico.} and published in Poverkhnost’. 
                         Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2012, 
                         No. 8, pp. 17–20.",
             keywords = "Processo de Sputtering em calcogenetos de chumbo.",
             abstract = "There is currently no general theory of multicom_ ponent material 
                         sputtering with variations in composi_ tion; however this process 
                         is becoming more and more widely used because of the increasingly 
                         important role of plasma technologies in forming nanostructured 
                         materials. The sputtering rates for binary compounds of lead 
                         chalcogenides PbX (X = Te, Se, S) were inves_ tigated in detail in 
                         [1, 2]. For the sputtering of solid solutions based on PbX, a 
                         model [3] based on taking the sublimation energy of the binary 
                         compounds of a ternary solution into account was proposed. For 
                         func_ tional testing of this theory, it is effective to use 
                         ternary compounds comprised of binary compounds with almost 
                         identical binding energies, resulting in uniformity of the 
                         sputtering rates upon variations in the composition. The lead 
                         telluridetin telluride Pb1 xSnxTe solid solutions were 
                         investigated as such test materials. These materi_ als are one of 
                         the most advanced multicomponent semiconductors, and are widely 
                         used in IR optoelec_ tronics [47] and in a new generation of 
                         thermoelec_ tric devices [8]. Their key feature is the opportunity 
                         to make task_specific changes of the band_gap width and refraction 
                         index [4, 5] by changing the mole fraction x within the range from 
                         0 to 1. The band_gap width of Pb1 xSnxTe increases with decreasing 
                         x, then becomes equal to zero, and then increases to a value 
                         corre_ sponding to SnTe; thus, the band edges remain inverted. 
                         Development of the technology of plasma treatment of these 
                         materials is necessary for the effec_ tive and highly economical 
                         production of active ele_ ments (photonic crystals, microdisks, 
                         and mesastruc_ tures) based on binary compounds and ternary solid 
                         solutions integrated onto single_crystal substrates. The purpose 
                         of this work was to investigate the rates of sputtering in argon 
                         plasma for Pb1 xSnxTe ternary solid solutions with mole fractions 
                         varying within the entire range of x from 0 to 1 in view of the 
                         crystalline state of the films.",
                  doi = "10.1134/S102745101208006X",
                  url = "http://dx.doi.org/10.1134/S102745101208006X",
                 issn = "1027-4510",
                label = "lattes: 3801575713681461 6 AmirovZiGoNaAbRa:2012:InInCo",
             language = "en",
           targetfile = "10.1134_S102745101208006X.pdf",
        urlaccessdate = "30 abr. 2024"
}